Simulation of Piezoelectric Actuator using ANSYS

Abstract

Devices deals with electrical and mechanical components are known as microelectromechanical system (MEMS) and leads to microfluidic. Such devices have shown promising results over the last few years in automotive, robotics and medical fields. This paper discusses overview of piezoelectric actuator having polydimethylsiloxane (PDMS) membrane attached with piezoelectric disk. ANSYS has been used for simulation and analysis. The alternating voltage of 25 V-150V with frequency of 250 Hz has been applied on piezoelectric actuator. The performance of actuator quantities such deflection, stress were explored. This obtainable research paper offers useful data to develop the enhanced design of MEMS based piezoelectric actuator.